In order to meet the needs of higher resonant frequency probes for noncontact atomic force microscope(NC- AFM)and improve the accuracy of the controller to improve the resolution of NC-AFM,a high-resolution probe oscillation system based on the changeof atomic force between probe and sample is proposed.The control part is designed in the Simulink environment,mainly through FPGA to realize the functions of phase discrimination,filtering and frequency locking;the driving part is driven by piezoelectric ceramics,and the probe base with convenient operation is designed.Sinusoidal signals of different frequencies are provided to the designed oscillation system for functional verification.The experimental results show that the probe resonance frequency can be tracked by the system within the frequency range of 20 kHz~50 MHz.Finally,the commercial probe is succesfully vibrated at the resonant frequency using the vibration initiation system,and the resonant frequency and vibration amplitude of the probe are accurately measured.The system frequency resolution reaches 0.1 Hz.