Abstract:To study the temperature characteristics of flexural vibration modal frequencies for microcantilevers, the theoretical models of temperature-frequency coefficients were established for anisotropic materials microcantilevers with constant rectangular cross-section. Then, a non-contact dynamic characteristic testing system for microstructures was constructed, including a laser vibrometer unit, air-coupled ultrasonic excitation unit, and temperature control unit. Finally, using the established testing system, the dynamic characteristics of single-crystal silicon microcantilevers with constant rectangular cross-section were tested over a temperature range from room temperature to 300℃. The change regularities with temperatures of the first three-order flexural vibration modal frequencies for the silicon microcantilever were figured out, and the temperature coefficients of the first three-order modal frequencies were obtained. The results indicate that the first three bending vibration modal frequencies of the single-crystal silicon microcantilevers approximately linearly decrease with increasing temperature. Moreover, the temperature coefficients of the first three-order modal frequencies are almost the same. Specifically, the temperature coefficient for the first modal frequency is -2.18E-5/℃, for the second modal frequency is -1.91E-5/℃, and for the third modal frequency is -2.01E-5/℃. The experimental results closely match those calculated by the theoretical model.