Abstract:Ultraprecision platform uses piezoelectric ceramic drivers to provide displacement feed. Strain gauge displacement sensor integrated drivers can be used to reduce the hysteresis and creep characteristics and improve precision of the displacement control. This paper designs and implements the displacement measuring circuit for the strain displacement sensor. The measurement principle of the resistance strain displacement sensor is introduced. Then, the displacement sensor circuit is designed, using instrumentation amplifier inphase attenuator and lowpass filter to obtain and output voltage signal that proportional to displacement change. Finally, the experiments of the displacement sensor circuit are carried out. The experiment results indicate that the electronic noise of the sensor circuit is 0.390 mV (peaktopeak value), and the resolution of the output voltage is less than 0.6 mV, the corresponding displacement resolution is up to 1 nm, which can effectively improve the precision of the piezoelectric ceramic.