汪龙祺 匡海鹏 曹小涛.紫外-真空紫外光谱反射率测试系统[J].国外电子测量技术,2015,34(9):17-21
紫外-真空紫外光谱反射率测试系统
Ultraviolet and vacuum ultraviolet spectral reflectance measurement system
  
DOI:
中文关键词:  光谱反射率  光谱分辨率  紫外 真空紫外  锁相放大
英文关键词:spectral reflectance  spectral resolution  ultraviolet and vacuum ultraviolet  lock in amplifier
基金项目:
作者单位
汪龙祺 匡海鹏 曹小涛 1.中国科学院航空光学成像与测量重点实验室中国科学院长春光学精密机械与物理研究所 2.中国科学院长春光学精密机械与物理研究所 
AuthorInstitution
Wang Longqi Kuang Haipeng Cao Xiaotao 1.Key Laboratory of Airborne Optical Imaging and Measurement, Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences 2.Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 
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中文摘要:
      为获取紫外 真空紫外光学元件的光谱反射率,构建了一套反射率测试系统。该反射率测试系统主要由Seya Namioka紫外 真空紫外单色仪、样品精密转台为主体的光机结构和电子学系统组成。首先,介绍了系统测量原理,采用双光路补偿法消除了光源随时间的飘移,通过改变系统光路进行两次测量来获取反射光与入射光数据,进而得到光谱反射率。接着对电子学硬件系统进行描述,给出了驱动控制单元与信号处理采集单元的硬件设计与组成。因紫外 真空紫外光谱信号微弱,采用了锁相放大的方法提高了测量精度。该反射率测试系统测试结果表明波长重复性0.05 nm,反射率测量重复精度为1.8%,系统功能完备稳定性好,能够实现对光学元件的高精度测量。
英文摘要:
      In order to obtain the spectral reflectance of ultraviolet and vacuum ultraviolet optical components, a set of reflectance measurement system is constructed. The reflectivity measurement system is composed of Seya Namioka ultraviolet and vacuum ultraviolet monochromator, a sample turntable as the main body of the optic and electronic system. First, the system principle of measurement is introduced, the elimination of the light source with the time drift is by double light path compensation method, to obtain the reflected light and incident light data by changing the system optical path of two measurements, and then obtain the spectral reflectance. Then carries on the description to the electronics hardware system, gives the hardware design and the composition of the driver control unit and the acquisition signal processing unit. Because ultraviolet and vacuum ultraviolet spectral signal is weak, lock in amplifier is applied in the electronics system to improve the measurement accuracy. The test results show that the reflectivity measurement system repeatability of wavelength is 0.05 nm, measurement repeatability is 1.8%. The system stability is good, can realize high precision measurement of optical elements.
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