扫描电子显微镜图像荷电现象的研究
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TN16

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Research of image charged phenomenon on scanning electron microscope
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    摘要:

    扫描电子显微镜在观察材料样品表面形貌领域应用广泛。在日常的实验过程中经常会遇到导电性能不佳的样品,这会产生不同程度的荷电现象,对图像质量以及样品的形貌表征都产生了极大的影响,时刻困扰着操作人员。为了克服这一问题,通过调整仪器参数设置、选择探测器以及辅助导电等手段,经过实验比对、理论验证,提出了7种方法,这些方法可以减轻或消除荷电效应对图像质量的影响,适用于当今主流的场发射扫描电子显微镜,应用广泛、适用性强。

    Abstract:

    Scanning electron microscope is widely used in the field of observation of the material surface morphology. However poor conductivity of the sample often found during the routine experiments, which results in some degrees of charge phenomenon. This largely impacts the quality of the image and the characterization of the sample morphology, which often confused operators. In order to solve this problem, this paper presents seven methods by adjusting the instrument parameter settings, selecting the detectors and the auxiliary conductive. Through experimental comparison and theory testing, those methods are confirmed to reduce or eliminate the impacts of charge effect on image quality, which are applicable to today's mainstream field emission scanning electron microscope, widely used and applicable.

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黎 爽 邓平晔 蔡锴.扫描电子显微镜图像荷电现象的研究[J].国外电子测量技术,2015,34(10):62-66

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  • 在线发布日期: 2015-11-09
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