Abstract:Scanning electron microscope is widely used in the field of observation of the material surface morphology. However poor conductivity of the sample often found during the routine experiments, which results in some degrees of charge phenomenon. This largely impacts the quality of the image and the characterization of the sample morphology, which often confused operators. In order to solve this problem, this paper presents seven methods by adjusting the instrument parameter settings, selecting the detectors and the auxiliary conductive. Through experimental comparison and theory testing, those methods are confirmed to reduce or eliminate the impacts of charge effect on image quality, which are applicable to today's mainstream field emission scanning electron microscope, widely used and applicable.